SNU Inter-university Semiconductor Research Center Receives 'HD1200' High-Vacuum Pumps from LOT Vacuum
Enhancing Sputtering and ALD Equipment Performance to Advance Thin-Film Research


▲ (From left) Jaeha Kim, Operations Manager at SNU Inter-university Semiconductor Research Center; Hyunki Park, Executive Director at LOT Vacuum; Hyuk Jae Lee, Director of SNU Inter-university Semiconductor Research Center; Heungsik Oh, Chairman of LOT Vacuum; Jong Ho Lee, Former Minister of Science and ICT and Professor at SNU Department of Electrical and Computer Engineering; Daesik Cho, President of LOT Vacuum

Seoul National University Inter-university Semiconductor Research Center announced that it has received two 'HD1200' high-vacuum screw pumps from LOT Vacuum, a leading semiconductor vacuum equipment company.

The HD1200 pumps are capable of rapidly achieving and maintaining a stable high vacuum of 10⁻³ Torr (10⁻¹ Pa), making them essential components for exhaust systems in metal sputtering and Atomic Layer Deposition (ALD) processes.

A donation ceremony was recently held at SNU, attended by Hyukj Jae Lee, Director of the SNU Inter-university Semiconductor Research Center; Jaeha Kim, Operations Manager; Jong Ho Lee, Professor at the Department of Electrical and Computer Engineering and former Minister of Science and ICT; Soonoh Park, Equipment Operations Manager; and from LOT Vacuum, Chairman Heungsik Oh, President Daesik Cho, and Executive Director Hyunki Park. The event underscored the significance of industry-academia collaboration.

Director Hyuk Jae Lee stated, "The introduction of the HD1200 pumps will significantly enhance the base pressure stability of our sputtering and ALD equipment, improving the reproducibility of thin metal film characteristics and the reliability of experimental data. We plan to further upgrade the vacuum quality of our internal processing equipment to enhance our overall educational and research environment."

Chairman Heungsik Oh of LOT Vacuum remarked, "Vacuum pumps are critical components directly linked to the performance of semiconductor processing equipment. We aim to establish a collaborative model where academia and industry grow together by leveraging domestic high-vacuum technology."

With this donation, SNU Inter-university Semiconductor Research Center intends to elevate the vacuum quality of its processing equipment, advance research and education infrastructure for metal thin-film processes, and contribute to enhancing the competitiveness of Korea's semiconductor technology.

Established in 2002, LOT Vacuum has commercialized high-vacuum solutions such as dry screw pumps and turbo molecular pumps using proprietary technology. The company supplies these solutions to domestic semiconductor and display production lines. Recently, LOT Vacuum has been expanding its energy-efficient pump product line and consistently operating equipment support programs for universities and research institutions to bolster the semiconductor ecosystem.
lotvacuum.com


▲ The 'HD1200' high-vacuum screw pump donated to SNU Inter-university Semiconductor Research Center by LOT Vacuum                                   


[Contact Information]
Soyeon Bang, SNU Inter-university Semiconductor Research Center / +82-2-880-9576 / thdussy@snu.ac.kr